Tribology of diamond-like carbon films from generic fabrication routes investigated by lateral force microscopy

A Crossley; Colin Johnston; Gregory S Watson; S Myhra

doi:10.1088/0022-3727/31/16/003

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Tribology of diamond-like carbon films from generic fabrication routes investigated by lateral force microscopy

Journal article

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Tribology of diamond-like carbon films from generic fabrication routes investigated by lateral force microscopy

A Crossley, Colin Johnston, Gregory S Watson and S Myhra

Journal of Physics D: Applied Physics, Vol.31(16), pp.1955-1962

1998

DOI: https://doi.org/10.1088/0022-3727/31/16/003

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Abstract

adhesion

carbon

chemical vapor deposition

electrostatics

friction

ion beam lithography

microscopic examination

surface structures

thick films

thin films

triboelectricity

tribology

The tribological characteristics of diamond-like carbon (DLC) films have been studied by lateral force microscopy (LFM). Specimens from two fabrication routes, ion-beam assisted deposition and chemical vapour deposition, have been investigated. Thick (micrometres) and thin (a few nanometres) films from both routes have been considered, as have the service environments of ambient air and vacuum. Lateral force data were calculated from 'friction loops', obtained as functions of load, surface topography, scan speed and service environment. An identical methodology and LFM probe were used throughout the series of measurements in order to ensure internal consistency, and the validity of the methodology was checked against measurements on epitaxially grown Si. A linear dependence was observed between lateral force and force loading up to ca 5 μN, in accord with a multi-asperity model, thus allowing determination of coefficients of friction that ranged from 0.05 to 0.15. The results showed that adhesive interactions contributed up to 2 μN to the overall dynamic load. Meniscus interaction played a minor role in comparison to that from tribo-generated electrostatic forces. The experiments show that LFM methodologies have value and relevance to the science and technology of tribology, especially when the required spatial resolution cannot be obtained with the traditional macroscopic techniques.

Details

Title: Tribology of diamond-like carbon films from generic fabrication routes investigated by lateral force microscopy
Authors: A Crossley (Author) - Griffith University
Colin Johnston (Author) - Griffith University
Gregory S Watson (Author) - Griffith University
S Myhra (Author) - Griffith University
Publication details: Journal of Physics D: Applied Physics, Vol.31(16), pp.1955-1962
Publisher: Institute of Physics Publishing Ltd.
Date published: 1998
DOI: 10.1088/0022-3727/31/16/003
ISSN: 0022-3727
Organisation Unit: School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
Language: English
Record Identifier: 99449586502621
Output Type: Journal article

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Collaboration types: International collaboration
Web Of Science research areas: Physics, Applied