Journal article
Synthesis of amorphous carbon nitride using reactive ion beam sputtering deposition with grazing bombardment
Diamond and Related Materials, Vol.10(12), pp.2184-2189
2001
Abstract
Amorphous carbon nitride (a-C:N) thin films were synthesised on steel substrates using reactive ion beam sputtering deposition (RIBSD). A single ion beam is arranged to sputter the graphite target at 75° incidence and concurrently bombard the growing film at grazing incidence angles of the ion beam. Nanoindentation, Raman spectroscopy, FTIR, FT-Raman and XPS were employed to characterise the mechanical and structural properties of the films. It was found that grazing incident bombardment has a significant effect on film structure through an increase in nitrogen content and formation of nitrogen doped structure. © 2001 Elsevier Science B.V. All rights reserved.
Details
- Title
- Synthesis of amorphous carbon nitride using reactive ion beam sputtering deposition with grazing bombardment
- Authors
- J M Bell (Author) - Queensland University of TechnologyZ Chen (Author) - Queensland University of TechnologyAyodele Olofinjana (Author) - Queensland University of Technology
- Publication details
- Diamond and Related Materials, Vol.10(12), pp.2184-2189
- Publisher
- Elsevier S.A.
- Date published
- 2001
- DOI
- 10.1016/S0925-9635(01)00505-2
- ISSN
- 0925-9635
- Organisation Unit
- School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
- Language
- English
- Record Identifier
- 99448764302621
- Output Type
- Journal article
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- Web Of Science research areas
- Materials Science, Coatings & Films
- Materials Science, Multidisciplinary
- Physics, Applied
- Physics, Condensed Matter