Low temperature bonding of ceramics by sol-gel processing

C J Barbé; D J Cassidy; G Triani; B A Latella; D R G Mitchell; K S Finnie; John R Bartlett; J L Woolfrey; G A Collins

doi:10.1023/A:1008733632163

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Low temperature bonding of ceramics by sol-gel processing

Journal article

Peer reviewed

Low temperature bonding of ceramics by sol-gel processing

C J Barbé, D J Cassidy, G Triani, B A Latella, D R G Mitchell, K S Finnie, John R Bartlett, J L Woolfrey and G A Collins

Journal of Sol-Gel Science and Technology, Vol.19(1-3), pp.321-324

2000

DOI: https://doi.org/10.1023/A:1008733632163

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Abstract

Materials Engineering

sol-gel films

bonding

silica

alumina

spincoating

Sol-gel bonds were produced between smooth, clean silicon or polycrystalline alumina substrates by spin-coating solutions containing partially hydrolysed silicon alkoxides onto both substrates. The two coated substrates were assembled and the resulting sandwich was fired at temperatures ranging from 300 to 600°C. The influence of the sol-gel chemistry on the film microstructure and interfacial fracture energy was investigated using a wide range of techniques, including ellipsometry, FTIR, TG-DTA, rheology, TEM and micro-indentation. For silicon wafers, an optimum water-alkoxide molar ratio of 10 and hydrolysis water pH of 2 were found. Such conditions led to relatively dense films (>90%), resulting in bonds with significantly higher fracture energy (3.5 J/m2) than those obtained using classical water bonding (typically 1.5 J/m2). Aging of the coating solution was found to decrease the bond strength. Poly-crystalline alumina substrates were similarly bonded at 600°C; the optimised silica sol-gel chemistry yielded interfaces with fracture energy of 4 J/m2.

Details

Title: Low temperature bonding of ceramics by sol-gel processing
Authors: C J Barbé (Author) - Australian Nuclear Science and Technology Organisation Materials Division
D J Cassidy (Author) - Australian Nuclear Science and Technology Organisation Materials Division
G Triani (Author) - Australian Nuclear Science and Technology Organisation Materials Division
B A Latella (Author) - Australian Nuclear Science and Technology Organisation Materials Division
D R G Mitchell (Author) - Australian Nuclear Science and Technology Organisation Materials Division
K S Finnie (Author) - Australian Nuclear Science and Technology Organisation Materials Division
John R Bartlett (Author) - Australian Nuclear Science and Technology Organisation Materials Division
J L Woolfrey (Author) - Australian Nuclear Science and Technology Organisation Materials Division
G A Collins (Author) - Australian Nuclear Science and Technology Organisation Materials Division
Publication details: Journal of Sol-Gel Science and Technology, Vol.19(1-3), pp.321-324
Publisher: Springer New York LLC
Date published: 2000
DOI: 10.1023/A:1008733632163
ISSN: 0928-0707
Organisation Unit: School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland
Language: English
Record Identifier: 99448887702621
Output Type: Journal article

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Web Of Science research areas: Materials Science, Ceramics