Journal article
Lithography and Fabrication of Frictional Tiers on Poly(Dimethylsiloxane) Using Atomic Force Microscopy
Journal of Surface Engineered Materials and Advanced Technology, Vol.2(3A), pp.233-237
2012
Abstract
This study investigates controlled micro/nano manipulation of polydimethylsiloxane (PDMS) using Atomic Force Mi-croscopy (AFM). Lithographic results revealed stick-slip phenomena along the slow scan direction. Varying the normal loading force, scan size, scan number and contact conditions allowed the control of certain lithographic outcomes e.g., channel spacing. The PDMS surface experienced significant in-plane deformation in response to the tip-induced lateral force. This displacement increased with increasing loading force, creating greater spacing between channels in the slow scan direction. Simultaneous generation of a lateral displacement in the fast scan direction caused a decrease in channel length with increasing loading force due to an increase in static friction with normal force, resulting in a greater surface relaxation, and shorter track length of dynamic friction. By controlling both the loading force and the number of scans over an area, frictional tiers were produced.
Details
- Title
- Lithography and Fabrication of Frictional Tiers on Poly(Dimethylsiloxane) Using Atomic Force Microscopy
- Authors
- Gregory S Watson (Author) - James Cook UniversityJolanta A Watson (Author) - James Cook University
- Publication details
- Journal of Surface Engineered Materials and Advanced Technology, Vol.2(3A), pp.233-237
- Publisher
- Scientific Research Publishing
- Date published
- 2012
- DOI
- 10.4236/jsemat.2012.223036
- ISSN
- 2161-4881
- Copyright note
- Copyright © 2012 The Authors and SciRes. This work and the related PDF file are licenced under a Creative Commons Attribution 4.0 International License.
- Organisation Unit
- School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
- Language
- English
- Record Identifier
- 99449831102621
- Output Type
- Journal article
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