Diamond-like-carbon (DLC) master creation for use in soft lithography using the Atomic Force Microscope (AFM)

Gregory S Watson; S Myhra; Jolanta A Watson

doi:10.1088/1742-6596/61/1/246

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Diamond-like-carbon (DLC) master creation for use in soft lithography using the Atomic Force Microscope (AFM)

Journal article

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Diamond-like-carbon (DLC) master creation for use in soft lithography using the Atomic Force Microscope (AFM)

Gregory S Watson, S Myhra and Jolanta A Watson

Journal of Physics: Conference Series, Vol.61(1), pp.1246-1250

2007

DOI: https://doi.org/10.1088/1742-6596/61/1/246

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Abstract

atomic force microscopy

Two and three dimensional polymeric structures at the nano and micro scale are increasingly being incorporated into micro and nano scale devices. Soft lithography can be employed for the creation of templates where a polymer replica can be produced. Obtaining a master is one of the limiting factors in the production of such replicas. This study demonstrates pattern generation on a highly durable and flat diamond-likecarbon (DLC) film with micro/nano-scale resolution using the atomic force microscope (AFM). The AFM is operated in the electrical conductivity mode which induces oxidation on the DLC surface. The technique offers features with line widths less than 20 nm. As a result, highly complex shapes can be produced with a depth being controlled by the DLC film thickness and/or by the bias voltage parameters. © 2007 IOP Publishing Ltd.

Details

Title: Diamond-like-carbon (DLC) master creation for use in soft lithography using the Atomic Force Microscope (AFM)
Authors: Gregory S Watson (Author) - Griffith University
S Myhra (Author) - University of Oxford, United Kingdom
Jolanta A Watson (Author) - Griffith University
Publication details: Journal of Physics: Conference Series, Vol.61(1), pp.1246-1250
Publisher: Institute of Physics Publishing Ltd.
Date published: 2007
DOI: 10.1088/1742-6596/61/1/246
ISSN: 1742-6588
Copyright note: Copyright © 2007. Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Published under licence by IOP Publishing Ltd
Organisation Unit: School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
Language: English
Record Identifier: 99450177202621
Output Type: Journal article

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Collaboration types: Domestic collaboration; International collaboration
Web Of Science research areas: Chemistry, Physical; Nanoscience & Nanotechnology; Physics, Atomic, Molecular & Chemical; Physics, Condensed Matter

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