Journal article
Design, Simulation and Optimization of Electrothermal Micro Actuator
Applied Mechanics and Materials, Vol.229-231, pp.1939-1943
2012
Abstract
This work presents the design and optimization of out of plane electrothermal MEMS actuators. The proposed concept is capable of generating large out of plane displacement at low driving power and a low actuation temperature. The performance of this actuator is evaluated and simulated in ANSYS. The out of plane displacement of 291µm at a temperature increase of 135°C from ambient has been achieved with the applied power of 2.7mW(0.7V). Moreover, a thermal time constant of 5.6ms and a frequency of 85Hz is accomplished for this actuator.
Details
- Title
- Design, Simulation and Optimization of Electrothermal Micro Actuator
- Authors
- Abid Ali (Author) - Quaid-i-Azam UniversityR.A Azim (Author) - National University of Sciences and TechnologyU.S Khan (Author) - National University of Sciences and TechnologyA.A Syed (Author) - Quaid-i-Azam UniversityU Izhar (Author) - National University of Sciences and Technology
- Publication details
- Applied Mechanics and Materials, Vol.229-231, pp.1939-1943
- Publisher
- Scientific.Net
- DOI
- 10.4028/www.scientific.net/AMM.229-231.1939
- ISSN
- 1662-7482
- Organisation Unit
- School of Science, Technology and Engineering; University of the Sunshine Coast, Queensland
- Language
- English
- Record Identifier
- 99622940402621
- Output Type
- Journal article
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