Atomic layer deposition of TiO2 and Al2O3 thin films and nanolaminates

D R G Mitchell; G Triani; D J Attard; K S Finnie; P J Evans; C J Barbé; John R Bartlett

doi:10.1088/0964-1726/15/1/010

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Atomic layer deposition of TiO2 and Al2O3 thin films and nanolaminates

Journal article

Peer reviewed

Atomic layer deposition of TiO2 and Al2O3 thin films and nanolaminates

D R G Mitchell, G Triani, D J Attard, K S Finnie, P J Evans, C J Barbé and John R Bartlett

Smart Materials and Structures, Vol.15(1), pp.S57-S64

2006

DOI: https://doi.org/10.1088/0964-1726/15/1/010

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Abstract

Chemical Sciences

Engineering

We have been developing our capability with atomic layer deposition (ALD), to understand the influence of deposition parameters on the nature of TiO 2 and Al2O3 films (high and low refractive index respectively), and multilayer stacks thereof (nanolaminates). These stacks have potential applications as anti-reflection coatings and optical filters. This paper will explore the evolution of structure in our films as a function of deposition parameters including temperature and substrate surface chemistry. A broad range of techniques have been applied to the study of these films, including cross-sectional transmission electron microscopy, spectroscopic ellipsometry and secondary-ion mass spectrometry. These have enabled a wealth of microstructural and compositional information on the films to be acquired, such as accurate film thickness, composition, crystallization sequence and orientation with respect to the substrate. The ALD method is shown to produce single-layer films and multilayer stacks with exceptional uniformity and flatness, and in the case of stacks, chemically abrupt interfaces. We are currently extending this technology to the coating of polymeric substrates.

Details

Title: Atomic layer deposition of TiO2 and Al2O3 thin films and nanolaminates
Authors: D R G Mitchell (Author) - Australian Nuclear Science and Technology Organisation
G Triani (Author) - Australian Nuclear Science and Technology Organisation
D J Attard (Author) - Australian Nuclear Science and Technology Organisation
K S Finnie (Author) - Australian Nuclear Science and Technology Organisation
P J Evans (Author) - Australian Nuclear Science and Technology Organisation
C J Barbé (Author) - Australian Nuclear Science and Technology Organisation
John R Bartlett (Author) - Australian Nuclear Science and Technology Organisation
Publication details: Smart Materials and Structures, Vol.15(1), pp.S57-S64
Publisher: Institute of Physics Publishing Ltd.
Date published: 2006
DOI: 10.1088/0964-1726/15/1/010
ISSN: 0964-1726; 0964-1726
Organisation Unit: School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland
Language: English
Record Identifier: 99448850602621
Output Type: Journal article

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Web Of Science research areas: Instruments & Instrumentation; Materials Science, Multidisciplinary