Journal article
Analysis on structure and properties of diamondlike carbon films from Ion beam deposition
Materials and Manufacturing Processes, Vol.15(5), pp.727-735
2000
Abstract
Diamondlike carbon (DLC) films from a primary ion beam deposition system, were examined using nanoindentation, SEM, AES, XPS, and Raman Spectroscopy. The films have hardness values ranging from 21 to 29 GPa. The results of SEM and AES show that the films are predominantly carbon without any crystalline features, and that nitrogen is incorporated as nitrogen is used as the ion beam source. XPS, and Raman Spectroscopy confirm that the films are amorphous carbon with a combination of sp3 with sp3 bonding. It is concluded that DLC films can be directly deposited on steel using a single ion beam to sputter the solid target, and the structure and properties of DLC largely depend on ion beam source.
Details
- Title
- Analysis on structure and properties of diamondlike carbon films from Ion beam deposition
- Authors
- Zhuping Chen (Author) - Queensland University of TechnologyAyodele Olofinjana (Author) - Queensland University of TechnologyJohn M Bell (Author) - Queensland University of Technology
- Publication details
- Materials and Manufacturing Processes, Vol.15(5), pp.727-735
- Publisher
- Taylor & Francis Inc.
- Date published
- 2000
- DOI
- 10.1080/10426910008913016
- ISSN
- 1042-6914
- Organisation Unit
- School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
- Language
- English
- Record Identifier
- 99448789902621
- Output Type
- Journal article
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- Web Of Science research areas
- Engineering, Manufacturing
- Materials Science, Multidisciplinary