A mechanistic approach to tip-induced nano-lithography of polymer surfaces

Jolanta A Blach; Gregory S Watson; C L Brown; D K Pham; J Wright; D V Nicolau; S Myhra

doi:10.1016/j.tsf.2003.12.105

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A mechanistic approach to tip-induced nano-lithography of polymer surfaces

Journal article

Peer reviewed

A mechanistic approach to tip-induced nano-lithography of polymer surfaces

Jolanta A Blach, Gregory S Watson, C L Brown, D K Pham, J Wright, D V Nicolau and S Myhra

Thin Solid Films, Vol.459, pp.95-99

2004

DOI: https://doi.org/10.1016/j.tsf.2003.12.105

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Abstract

atomic force microscopy

lithography

polymers

ploughing

Tip-induced lithography based on local probe methods is a contender for next-generation technologies that require spatially differentiated topographical and/or chemical manipulation of polymer surfaces on the nano-scale. The present project is based on force microscopy and has demonstrated topographical manipulation of P(tBuMA) at a line width of 20-30 nm. Lateral force analysis shows that the surface chemistry can also be manipulated with comparable spatial resolution. The present project has been concerned with establishing relationships between lithographic outcomes and tip shape, linear raster speed, out-of-plane normal force, and in-plane shear/friction force. Elements of 'ploughing', in combination with elastic recovery and chain scission appear to be necessary aspects of an explanatory model. © 2003 Elsevier B.V. All rights reserved.

Details

Title: A mechanistic approach to tip-induced nano-lithography of polymer surfaces
Authors: Jolanta A Blach (Author) - Griffith University
Gregory S Watson (Author) - Griffith University
C L Brown (Author) - Griffith University
D K Pham (Author) - Swinburne University
J Wright (Author) - Swinburne University
D V Nicolau (Author) - Swinburne University
S Myhra (Author) - Griffith University
Publication details: Thin Solid Films, Vol.459, pp.95-99
Publisher: Elsevier Inc.
Date published: 2004
DOI: 10.1016/j.tsf.2003.12.105
ISSN: 0040-6090
Organisation Unit: School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
Language: English
Record Identifier: 99449183502621
Output Type: Journal article

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Collaboration types: Domestic collaboration
Web Of Science research areas: Materials Science, Coatings & Films; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter