Single Camera Measurement of Out of Plane (OoP) Displacement

Umer Izhar; Daluwathu Mulla Gamage Preethichandra

doi:10.1109/ICST46873.2019.9047733

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Single Camera Measurement of Out of Plane (OoP) Displacement

Conference paper

Peer reviewed

Single Camera Measurement of Out of Plane (OoP) Displacement

Umer Izhar and Daluwathu Mulla Gamage Preethichandra

Proceedings of the 2019 13th International Conference on Sensing Technology (ICST 2019), pp.1-4

International Conference on Sensing Technology (ICST), 13th (Sydney, Australia, 02-Dec-2019–04-Dec-2019)

Institute of Electrical and Electronics Engineers

2019

DOI: https://doi.org/10.1109/ICST46873.2019.9047733

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Abstract

Image processing

measurement by laser beam

laser beams

displacement measurement

actuators

cameras

calibration

component

out of plane displacement

distance measurement

image processing for distance measurement

microactuator deflection

In this paper we propose a method which is useful to measure out of plane displacement of beams. The proposed method is targeted to be effective in micro fabrication applications where a speckle pattern is impossible to make on the microactuators. However, microfabrication techniques where etch holes are used to release actuator beams can make use of this method. The paper presents the application of image processing techniques that can be exploited to measure effective in-plane pixel displacement for a corresponding out of plane (vertical) beam displacements. Firstly, a calibration measurement is taken at known beam deflections. Secondly, beam deflection at various unknown points can be extracted. Lastly, a profile of the beam deflection along its length can be achieved for any deflection.

Details

Title: Single Camera Measurement of Out of Plane (OoP) Displacement
Authors: Umer Izhar (Author) - Central Queensland University
Daluwathu Mulla Gamage Preethichandra (Author) - Central Queensland University
Publication details: Proceedings of the 2019 13th International Conference on Sensing Technology (ICST 2019), pp.1-4
Conference details: International Conference on Sensing Technology (ICST), 13th (Sydney, Australia, 02-Dec-2019–04-Dec-2019)
Publisher: Institute of Electrical and Electronics Engineers
Date published: 2019
DOI: 10.1109/ICST46873.2019.9047733
ISSN: 2156-8073; 2156-8065
ISBN: 9781728148076
Organisation Unit: University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
Language: English
Record Identifier: 99622140902621
Output Type: Conference paper

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