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Optimization of SCR for Sensitivity Enhancement of Cantilever based Piezoresistive Sensor
Conference paper   Peer reviewed

Optimization of SCR for Sensitivity Enhancement of Cantilever based Piezoresistive Sensor

Tayyab Shahid, Umer Izhar, Abid Ali, Talha Shahid and Taha Janjua
Proceedings of the 2016 2nd International Conference on Robotics and Artificial Intelligence (ICRAI), pp.136-140
International Conference on Robotics and Artificial Intelligence (ICRAI), 2nd (Rowalpindi, Pakistan, 01-Nov-2016–02-Nov-2016)
Institute of Electrical and Electronics Engineers
2016
url
https://doi.org/10.1109/ICRAI.2016.7791242View
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Abstract

Optimal Sensor Stress Concentration region MEMS Finite Element Analysis
This paper proposes an optimal defect shape to increase the sensitivity of a MEMS cantilever based piezoresistive sensor. This workdescribes the sensitivity improvement using Stress concentration region (SCR) introduced in the cantilever beam. The SCR improves the surface stress on the cantilever beamandenhancesthesensitivity of the sensor. A particulardefect (sigma star) is introduced which is designed and place in a way that increases the sensitivity by about 20%.

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