Conference paper
Optimization of SCR for Sensitivity Enhancement of Cantilever based Piezoresistive Sensor
Proceedings of the 2016 2nd International Conference on Robotics and Artificial Intelligence (ICRAI), pp.136-140
International Conference on Robotics and Artificial Intelligence (ICRAI), 2nd (Rowalpindi, Pakistan, 01-Nov-2016–02-Nov-2016)
Institute of Electrical and Electronics Engineers
2016
Abstract
This paper proposes an optimal defect shape to increase the sensitivity of a MEMS cantilever based piezoresistive sensor. This workdescribes the sensitivity improvement using Stress concentration region (SCR) introduced in the cantilever beam. The SCR improves the surface stress on the cantilever beamandenhancesthesensitivity of the sensor. A particulardefect (sigma star) is introduced which is designed and place in a way that increases the sensitivity by about 20%.
Details
- Title
- Optimization of SCR for Sensitivity Enhancement of Cantilever based Piezoresistive Sensor
- Authors
- Tayyab Shahid (Author) - National University of Sciences and TechnologyUmer Izhar (Author)Abid Ali (Author) - City University of Hong KongTalha Shahid (Author)Taha Janjua (Author)
- Publication details
- Proceedings of the 2016 2nd International Conference on Robotics and Artificial Intelligence (ICRAI), pp.136-140
- Conference details
- International Conference on Robotics and Artificial Intelligence (ICRAI), 2nd (Rowalpindi, Pakistan, 01-Nov-2016–02-Nov-2016)
- Publisher
- Institute of Electrical and Electronics Engineers
- Date published
- 2016
- DOI
- 10.1109/ICRAI.2016.7791242
- ISBN
- 9781509040599
- Organisation Unit
- University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
- Language
- English
- Record Identifier
- 99622139902621
- Output Type
- Conference paper
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