Low-temperature bonding of ceramics by sol-gel processing

C J Barbé; D J Cassidy; G Triani; B A Latella; D R G Mitchell; A Day; K Short; John R Bartlett; J L Woolfrey; G A Collins

doi:10.1557/PROC-587-O4.6

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Low-temperature bonding of ceramics by sol-gel processing

Conference paper

Peer reviewed

Low-temperature bonding of ceramics by sol-gel processing

C J Barbé, D J Cassidy, G Triani, B A Latella, D R G Mitchell, A Day, K Short, John R Bartlett, J L Woolfrey and G A Collins

Materials Research Society Symposium Proceedings, Vol.587, pp.O4.6.1-O4.6.7

Materials Research Society Fall Meeting: Substrate engineering paving the way to epitaxy, 1999 (Boston, United States, 29-Nov-1999–03-Dec-1999)

Materials Research Society

1999

DOI: https://doi.org/10.1557/PROC-587-O4.6

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Abstract

Macromolecular and Materials Chemistry

Sol-gel bonding was produced between smooth, clean substrates of silicon and polycrystalline alumina by spin-coating solutions containing partially hydrolyzed silicon alkoxides. The two coated-substrates were assembled and the resulting sandwich was fired at temperatures ranging from 300 to 600 °C. The coatings and bonded substrates were investigated using SEM, TEM and micro-indentation. For silicon wafers, an optimum water-to-alkoxide molar ratio of 10 and hydrolysis water pH of 2 was found. Such conditions led to relatively dense films (>90%), resulting in bonds with a fracture energy of 3.5 J/m 2, which is significantly higher than those obtained using hydrophilic wafer bonding (typically 1.5 J/m 2). Poly-crystalline alumina substrates were similarly bonded at 600 °C; the optimized silica sol-gel chemistry yielded interfaces with fracture energy of 4 J/m 2.

Details

Title: Low-temperature bonding of ceramics by sol-gel processing
Authors: C J Barbé (Author) - Australian Nuclear Science and Technology Organisation Materials Division
D J Cassidy (Author) - Australian Nuclear Science and Technology Organisation Materials Division
G Triani (Author) - Australian Nuclear Science and Technology Organisation Materials Division
B A Latella (Author) - Australian Nuclear Science and Technology Organisation Materials Division
D R G Mitchell (Author) - Australian Nuclear Science and Technology Organisation Materials Division
A Day (Author) - Australian Nuclear Science and Technology Organisation Materials Division
K Short (Author) - Australian Nuclear Science and Technology Organisation Materials Division
John R Bartlett (Author) - Australian Nuclear Science and Technology Organisation Materials Division
J L Woolfrey (Author) - Australian Nuclear Science and Technology Organisation Materials Division
G A Collins (Author) - Australian Nuclear Science and Technology Organisation Materials Division
Contributors: D H Matthieson (Editor)
N Newman (Editor)
D P Norton (Editor)
D G Schlom (Editor)
Publication details: Materials Research Society Symposium Proceedings, Vol.587, pp.O4.6.1-O4.6.7
Conference details: Materials Research Society Fall Meeting: Substrate engineering paving the way to epitaxy, 1999 (Boston, United States, 29-Nov-1999–03-Dec-1999)
Publisher: Materials Research Society
Date published: 1999
DOI: 10.1557/PROC-587-O4.6
ISSN: 0272-9172
Organisation Unit: School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland
Language: English
Record Identifier: 99448765602621
Output Type: Conference paper

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