Abstract
Accelerometer is an important sensor of inertial navigation system. Focus of new developments is a low cost, small size sensor with high performance that meets the requirements of navigation. In this paper a multi wafer magnetic MEMS accelerometer design is proposed for inertial navigation. Capacitive pick off is used to sense deflection of sensor mass and permanent magnet & coil is used for rebalancing of deflected mass of the sensor. Total two sides capacitive area of sensor is 18 mm 2 with gap of 8µm. Permanent magnet with thickness of 330 µm and diameter of 700 µm and soft magnet material coating is used. Out of plane coil with total 64 turns, 8 layers and cross-section area 20µm x20µm is used. Fabrication process outlines for both, the magnetic system and coils are proposed separately. Stress analysis for flexures of sensing pendulum has been carried out. Close loop frequency response analysis is carried out with a proposed PID controller.