An electrothermally actuated bi-axis scanning micromirror for medical imaging applications

Umer Izhar; B S Ooi; S Tatic-Lucic

doi:10.1109/OMEMS.2009.5338599

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An electrothermally actuated bi-axis scanning micromirror for medical imaging applications

Conference paper

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An electrothermally actuated bi-axis scanning micromirror for medical imaging applications

Umer Izhar, B S Ooi and S Tatic-Lucic

Proceedings of the 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, pp.53-54

IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, 2009 (Clearwater, United States, 17-Aug-2009–20-Aug-2009)

Institute of Electrical and Electronics Engineers

2009

DOI: https://doi.org/10.1109/OMEMS.2009.5338599

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Abstract

Biomedical imaging

electrothermal effects

micromirrors

mirrors

temperature

optical device fabrication

connectors

biomedical optical imaging

aluminum

actuators

We present the design, fabrication and initial characterization results of a novel electrothermal micromirror. Deflection angle of up to 20 0 at input power of 14mW with temperature of less than 100 0 C was observed.

Details

Title: An electrothermally actuated bi-axis scanning micromirror for medical imaging applications
Authors: Umer Izhar (Author) - Lehigh University
B S Ooi (Author) - Lehigh University
S Tatic-Lucic (Author) - Lehigh University
Publication details: Proceedings of the 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, pp.53-54
Conference details: IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, 2009 (Clearwater, United States, 17-Aug-2009–20-Aug-2009)
Publisher: Institute of Electrical and Electronics Engineers
Date published: 2009
DOI: 10.1109/OMEMS.2009.5338599; 10.1109/OPTMEMS14291.2009
ISSN: 2160-5041; 2160-5033
Organisation Unit: University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
Language: English
Record Identifier: 99622940002621
Output Type: Conference paper

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