AFM-based micro/nano-scale lithography of poly(dimethylsiloxane) - Stick-slip on a 'soft' polymer

Jolanta A Watson; S Myhra; C L Brown; Gregory S Watson

doi:10.1117/12.582650

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AFM-based micro/nano-scale lithography of poly(dimethylsiloxane) - Stick-slip on a 'soft' polymer

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AFM-based micro/nano-scale lithography of poly(dimethylsiloxane) - Stick-slip on a 'soft' polymer

Jolanta A Watson, S Myhra, C L Brown and Gregory S Watson

Proceedings of SPIE - International Society for Optical Engineering, Vol.5650, pp.474-482

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, 2004 (Sydney, Australia, 13-Dec-2004–15-Dec-2004)

SPIE: International Society for Optical Engineering

2005

DOI: https://doi.org/10.1117/12.582650

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Abstract

AFM

nanostructures

PDMS

soft lithography

surface modification

poly(dimethylsiloxane) (PDMS)

surface relaxation

thermal shock

atomic force microscopy

elastomers

electron beams

machine tools

rubber

surface treatment

nanotechnology

Silicone rubbers have steadily gained importance in ' industry since their introduction in the 1960's. Poly(dimethylsiloxane) (PDMS) is a relatively soft and optically clear, two-part elastomer with interesting and, more importantly, useful physical and electrical properties. Some of its common applications include protective coatings (e.g., against moisture, environmental attack, mechanical and thermal shock and vibrations), and encapsulation (e.g., amplifiers, inductive coils, connectors and circuit boards). The polymer has attracted recent interest for applications in soft lithography. The polymer is now routinely used as a patterned micro-stamp for chemical modification of surfaces, in particular Au substrates. Prominent stick-slip effects, surface relaxation and elastic recovery were found to be associated with micro/nano manipulation of the polymer by an AFM-based contact mode methodology. Those effects provide the means to explore in detail the meso-scale tip-to-surface interactions between a tip and a soft surface. The dependence of scan speed, loading force, attack angle and number of scan lines have been investigated.

Details

Title: AFM-based micro/nano-scale lithography of poly(dimethylsiloxane) - Stick-slip on a 'soft' polymer
Authors: Jolanta A Watson (Author) - Griffith University
S Myhra (Author) - Griffith University
C L Brown (Author) - Griffith University
Gregory S Watson (Author) - Griffith University
Contributors: Jung-Chih Chiao (Editor)
David N Jamieson (Editor)
Lorenzo Faraone (Editor)
Andrew S Dzurak (Editor)
Publication details: Proceedings of SPIE - International Society for Optical Engineering, Vol.5650, pp.474-482
Conference details: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, 2004 (Sydney, Australia, 13-Dec-2004–15-Dec-2004)
Publisher: SPIE: International Society for Optical Engineering
Date published: 2005
DOI: 10.1117/12.582650
ISBN: 9780819456106
Organisation Unit: School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
Language: English
Record Identifier: 99449230702621
Output Type: Conference paper

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