Conference paper
A Biaxial Micromirror for Angular and Depth Scanning in Optical Coherence Tomography (OCT)
Hilton Head 2010 Technical digest, pp.230-233
Hilton Head Workshop: A Solid-State Sensors, Actuators, and Microsystems Workshop, 2010 (Hilton Head Island, United States, 06-Jun-2010 - 10-Jun-2010)
Transducer Research Foundation
2010
Abstract
A novel gimbal-less, thermally actuated micromirror is developed which can be used as both a reference and scanning mirror in optical coherence tomography (OCT) applications. Maximum deflection angle of up to 28° has been achieved at 12mW in scanning mode. A vertical displacement of 116µm at 12mW (78±4°C) was observed in piston mode. Our design goal for this mirror is to undergo 5° angle. This deflection was accomplished at a temperature increase of 17±5°C with respect to ambient. Our device can be integrated with GaAs optics due to this moderate temperature increase during its operation.
Details
- Title
- A Biaxial Micromirror for Angular and Depth Scanning in Optical Coherence Tomography (OCT)
- Authors
- Umer Izhar (Author) - Lehigh UniversityB S Ooi (Author) - King Abdullah University of Science and TechnologyS Tatic-Lucic (Author) - Lehigh University
- Contributors
- David J Monk (Editor)Kimberly L Turner (Editor)
- Publication details
- Hilton Head 2010 Technical digest, pp.230-233
- Conference details
- Hilton Head Workshop: A Solid-State Sensors, Actuators, and Microsystems Workshop, 2010 (Hilton Head Island, United States, 06-Jun-2010 - 10-Jun-2010)
- Publisher
- Transducer Research Foundation
- DOI
- 10.31438/trf.hh2010.61; 10.31438/trf.hh2010.0
- ISSN
- 1539-204X
- Organisation Unit
- University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
- Language
- English
- Record Identifier
- 99622940102621
- Output Type
- Conference paper
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