Parallel and serial generated patterned DLC surfaces for creating three-dimensional polymeric stamp structures

Gregory S Watson; Sverre Myhra; Jolanta A Watson

doi:10.1016/j.susc.2011.02.019

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Parallel and serial generated patterned DLC surfaces for creating three-dimensional polymeric stamp structures

Journal article

Peer reviewed

Parallel and serial generated patterned DLC surfaces for creating three-dimensional polymeric stamp structures

Gregory S Watson, Sverre Myhra and Jolanta A Watson

Surface Science, Vol.605(11-12), pp.989-993

2011

DOI: https://doi.org/10.1016/j.susc.2011.02.019

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Abstract

Condensed Matter Physics

Quantum Physics

Physical Chemistry (incl. Structural)

DLC

diamond-like-carbon

atomic Force Microscopy

lithography

micro/nano structures

polymer

PDMS

This study demonstrates pattern generation on a highly durable and flat diamond-like-carbon (DLC) film with micro/nano-scale resolution using the Atomic Force Microscope (AFM). Parallel processing (masked lithography) and serial local probe processing (maskless lithography) have both been utilized to produce a range of structure shapes at different length scales. The AFM is operated in the electrical conductivity mode which induces oxidation on the DLC surface. The technique offers features with structure depths as small as 20 nm (serial processing) and pattern replication of many centimeters (parallel processing). Moreover parallel processed structures may be further modified via serial patterning using the same instrumentation. As a result, complex shapes can be produced with a depth being controlled by the DLC film thickness and/or by the bias voltage parameters. The patterned DLC structures can be used as a template for fabrication of 3 dimensional polymeric structures.

Details

Title: Parallel and serial generated patterned DLC surfaces for creating three-dimensional polymeric stamp structures
Authors: Gregory S Watson (Author) - James Cook University
Sverre Myhra (Author) - University of Oxford, United Kingdom
Jolanta A Watson (Author) - James Cook University
Publication details: Surface Science, Vol.605(11-12), pp.989-993
Publisher: Elsevier BV
Date published: 2011
DOI: 10.1016/j.susc.2011.02.019
ISSN: 0039-6028; 0039-6028
Organisation Unit: School of Science and Engineering - Legacy; University of the Sunshine Coast, Queensland; School of Science, Technology and Engineering
Language: English
Record Identifier: 99449271902621
Output Type: Journal article

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Collaboration types: Domestic collaboration; International collaboration
Web Of Science research areas: Chemistry, Physical; Physics, Condensed Matter